Microfabrication for Microfluidics

Microfluidics is an emerging field involving fluid flow and devices in microscale and nanoscale. Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for the professional’s reference shelf. Practitioners find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons. To complement the book, a companion website will be periodically updated with the latest details on the subject, such as etch rates, mechanical properties, optical properties, and feature resolution for the different materials used in microfluidic devices.