Semiconductor Industry: Wafer Fab Exhaust Management

Given the variety of different exhaust compounds and the various problems that they pose for the exhaust management system, the proper choice of such system can become a confusing and daunting task. This invaluable reference offers practical guidance on selecting an appropriate system for a given application. The author begins with facility layout, support facilities operation, and semiconductor process equipment, followed by exhaust types and challenges. Next, several chapters explore the different types of devices such as point-of-use devices, centralized wet scrubbers, and centralized VOC control. The book concludes with chapters devoted to emergency releases and examples of these systems in use.