Optimal Synthesis Methods for MEMS

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The multidisciplinary nature of microelectromechanical systems (MEMS) places huge demands on the MEMS designer to have expertise in many areas. Despite the increasing availability of analysis methods and simulation tools for MEMS, the process of conceiving a design or optimizing it is still largely dependent on designer’s experience, expertise, and creativity. Synthesis methods, on the other hand, can automatically generate and optimize designs for user-specified requirements saving considerable time. They are capable of new designs that human designers might find it hard to get by manual iteration-based analysis methods. This text is a collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This book underscores the importance of synthesis in designing MEMS efficiently and economically.