Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum: Design, Operation and Safety details important and practical considerations surrounding the design of vacuum systems for various vacuum deposition technologies. Topics covered include the vacuum and end uses, molecular density in vacuums, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance.

The book’s introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice, with system design, assembly, maintenance and troubleshooting are reviewed. In addition, the book provides a wide range of pressure measurement approaches and includes several key characterization techniques and example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as tradeoffs surrounding system design.