Handbook of Thin Films, Five-Volume Set

king for the 21st Century king for the 21st Century ethods of deposition of hydrogenated amorphous silicon for device applic ations

2 Atomic Layer Deposition

3 Las er Applications in Transparent Conducting Oxide Thin Film Processing

4 Cold Plasma Processing in Surface Science and Technology

5 Electrochemical Formation of Thin Films of Binary II I-V Compounds

6 Nucleation, Growth and Crystallization of Thin Films

7 Ion Implant Doping and Isolation of GaN and Related Materials

8 Plasma Etching of GaN and Rela ted Materials

9 Residual Stresses in Physically Vapor D eposited Thin Films

10 Langmuir-Blodgett Films of Biolo gical Molecules

11 Structure Formation During Electrocr ystallization of Metal Films

12 Epitaxial Thin Films of Intermetallic Compounds

13 Pulsed Laser Deposition of Thin Films: Expectations and Reality

14 b’-Alumina Sing le-Crystal Films

Volume 2 Characte