Basic Vacuum Technology, 2nd edition
A Chambers,R Fitch,B Halliday,Halliday B. S
Basic Vacuum Technology, 2nd edition
A Chambers,R Fitch,B Halliday,Halliday B. S
An introductory text on how to use vacuum techniques. It provides a grounding in the basic scientific principles and concepts which underlie the production and measurement of vacua. This edition includes more worked examples, more information on basic gas properties, and an expanded approach to changed needs in vacuum applications in semiconductor processing.
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