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Home / Novel Silicon Based Technologies: Conference Proceedings
Novel Silicon Based Technologies: Conference Proceedings
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Novel Silicon Based Technologies: Conference Proceedings

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Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for

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MORE INFO
Format
Hardback
Publisher
Kluwer Academic Publishers
Country
United States
Date
31 January 1991
Pages
292
ISBN
9780792311126

Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for

Read More
Format
Hardback
Publisher
Kluwer Academic Publishers
Country
United States
Date
31 January 1991
Pages
292
ISBN
9780792311126

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